The linear travel of the X and Y axes is 50 mm x 50mm, and the resolution of each axis is 5microns(non-micro-step) or 0.125microns (with 20 micro-steps per step motor driver in use), repeatability is 1.5microns, and positional accuracy is 5microns.
Source URL: Optimal Engineering Systems announces AU200-50×50-SC Alignment Stage
Source Website: Factory Automation – Automation.com